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Magnetron Sputtering
Description: Kurt Lesker PVD 75 PRO Line
Specifications: DC and RF Magnetron sputtering
Deposition capability: all kinds of metals, ITO, IZO
Materials available: ITO and IZO
Target size: 4 inches
Substrate Temperature: 25ºC to 350ºC
Substrate dimension: 6 inches
Substrate rotation: Yes
Gases: Argon and Oxygen.
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